3M Novec7300 Electronic fluorination solution Cas 132182-92-4

Introduction

3M™ Novec™ 7300 Engineered Fluid is a clear, colorless, odorless fluid that has utility in a wide variety of 
applications, including heat transfer, lubricant deposition, electronic testing and cleaning applications. 
Novec 7300 fluid, a segregated hydrofluoroether, is non-flammable, thermally stable, non-ozone depleting, 
and has a very low global warming potential. Novec 7300 fluid does not contribute to the formation of 
photochemical smog. An exemption from the U.S. EPA definition of a VOC has been requested. The 
product is recommended for use as a replacement for perfluoropolyethers (PFPEs), perfluorocarbons (PFCs), 
hydrochlorofluorocarbons (HCFCs), and hydrofluorocarbons (HFCs). On this basis, Novec 7300 fluid provides 
a useful tool to help meet commitments for greenhouse gas emission reduction.
The boiling point, wide liquid range and low-temperature viscosity of Novec 7300 fluid make it ideal for 
cooling ion implanters, dry etchers, and CVD machines. Novec 7300 fluid is effective at mitigating the 
aggressiveness of solvents and is useful in inerting the flammability of blends. The chemical and thermal 
stability of Novec 7300 fluid lend to its use as a reaction media.

Typical Physical Properties

Table 1

Environmental and Safety Properties

Table 2

1CFC-11=1.0 

2 GWP–100 year ITH, CO2 = 1.0

Vapor Pressure and Density

The variation of vapor pressure and density with temperature of 3M™ Novec™ 7300 Engineered Fluid can be 
calculated using the following formulas:
Vapor Pressure: P = exp(-6504.623709/(t + 350) + 21.151057)
Density: D = 1.7162 – 0.0024t
P = Vapor Pressure in mmHg
t = Temperature in °C
D = Density in g/ml

Heat Transfer

Novec 7300 fluid is ideal as a heat transfer fluid for the demanding requirements of semiconductor processing 
and electronics equipment. Novec 7300 fluid is designed to balance performance with favorable environmental 
and worker safety properties. In heat transfer applications, Novec 7300 fluid offers:

• Excellent dielectric properties     • Nonflammability
     • Wide liquid range          • Low Global Warming Potential (GWP)
     • Good materials compatibility     • Zero Ozone Depletion Potential (ODP)
     • Low toxicity
For heat transfer applications, favorable environmental health and safety properties make Novec 7300 fluid a 
long-term, sustainable solution, helping improve reliability, address environmental concerns and lower overall 
operating costs.

Solvent Properties

Novec 7300 fluid is an excellent replacement for PFCs, HCFCs, and HFCs in many solvent applications. A high 
purity version of Novec 7300 fluid, marketed as Novec 7300DL Engineered Fluid, is available for applications 
such as the deposition of lubricants onto hard disk drive media and for high purity cleaning applications in the 
semiconductor industry. Contact your local 3M representative for more information. 
Novec 7300 fluid has shown utility in solvent cleaning applications–both in its neat form, and when blended 
with organic solvents, and/or other hydrofluoroethers, hydrofluorocarbons and other fluorinated solvents. 
Azeotropic mixtures of Novec 7300 fluid have been demonstrated with several commonly used cleaning 
solvents. Novec 7300 fluid can also be used as a medium for quality and reliability testing of integrated circuits.

Materials Compatibility
3M™ Novec™ 7300 Engineered Fluid is compatible with most metals and hard polymers such as:

Elastomeric materials should be limited to those compounds that contain the least amount of extractible 
plasticizer. 3M engineers can suggest appropriate compounds or assist with test procedures for your evaluation.

Safety and Handling
Be sure to read and follow the precautions and directions for use contained in the product label and Material 
Safety Data Sheet before using this product. 
Novec 7300 fluid is nonflammable and is highly resistant to thermal breakdown and hydrolysis in storage and 
during use. Recommended handling procedures are provided in the Material Safety Data Sheet.
A product Material Safety Data Sheet is available upon request from your local 3M representative, or online at 
www.3M.com/electronics.

More 3M™ Novec™ Engineered Fluids

1GWP–100 year ITH, CO2 = 1.0

Recycle and Disposal Options
Used Fluid Return Program

3M offers a program for free pickup and return of used 3M specialty fluids in the U.S. A pre-negotiated 
handling agreement between users and our authorized service provider offers users broad protection against 
future liability for used 3M product. The fluid return program is covered by independent third-party financial 
and environmental audits of treatment, storage and disposal facilities. Necessary documentation is provided. 
A minimum of 30 gallons of used 3M specialty fluid is required for participation in this free program.
For additional information on the 3M Used Fluid Return Program, contact your local 3M representative or call 
3M Customer Service at 800.810.8513.

Resources

3M™ Novec™ Engineered Fluids are supported by global sales, technical and customer service resources, 
with technical service laboratories in the U.S., Europe, Japan, Latin America and Southeast Asia. Users 
benefit from 3M’s broad technology base and continuing attention to product development, performance, 
safety and environmental issues. For additional technical information on 3M™ Novec™ 7300 Engineered 
Fluid in the United States or for the name of a local authorized distributor, call 3M Electronics Markets 
Materials Division: 800 810 8513.